Affiliation:
1. University of Science and Technology of China
Abstract
Vibration is a significant factor that influences the performance of the long-range ultra-precise positioning system. Due to the intense nonlinearity and parameter uncertainties, it is difficult to eliminate the vibration by using a conventional PID controller. In this paper, the intelligent PID controller based on BP neural network with the ability of self-learning and strong robustness is introduced into the positioning system. Simulation and experiment are conducted and the results show that the vibration is effectively suppressed and the positioning accuracy has reached within 5.8nm.
Publisher
Trans Tech Publications, Ltd.
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1 articles.
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