Experimental and Simulation Study on Diamond Convex Surface Film

Abstract

Diamond convex surface films were synthesized on molybdenum substrate using DC plasma Jet CVD (DCPJCVD), and their microstructure and topography were characterized by those techniques such as X ray diffraction, Raman spectroscopy respectively. It showed that, when the substrate was pre-treated by polishing using successive micron diamond powder (about 30～3μm), diamond film was a polycrystalline texture and (111) faces were dominant. Raman spectrum shows that high quality diamond convex surface film was prepared successfully. Meantime, We used Finite element methods (FEM) to simulate the velocity, pressure and temperature fields of reaction chamber respectively, and it indicated that the distribution of the velocity, pressure fields were fluctuant, which had negative influence on diamond film, but the temperature fields is uniform, and it is an important factor to prepare high quality diamond convex surface film.