New Style Four-Electrode MEMS Conductivity Chip-Reference-Cited by-同舟云学术

New Style Four-Electrode MEMS Conductivity Chip

Published:2011-06 Issue: Volume:483 Page:475-480
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Wu Shao Hua¹,Zhao Zhan²,Fang Zhen²,Du Li Dong¹,Geng Dao Qu²,Xu Jing³,Zhao Jun Juan¹

Affiliation:

1. Chinese Academy of Sciences

2. Chinese Academy of Science

3. State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science.

Abstract

MEMS sensor for solution conductivity measurement has been applied widely which has many advantages such as cheap, accurate, batch fabricate, and good consistent etc. Existent MEMS conductivity sensors usually have planar structure with four short parallel electrodes so that the two voltage electrodes are tend to be polluted and consequently lead to mistakes for the conductivity test system. A new pattern of conductivity chip with an annular voltage electrode to enhance the ability of anti-pollution based on MEMS technology is going to be introduced in this article; the ANSYS simulation is applied to help demonstrate the reasons why the new pattern of conductivity chip has good ability of anti-pollution and the experiment results are also presented to show the performance of the conductivity sensor.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.483.475.pdf

Reference6 articles.

1. Hyldgard A, Hansen O, Thomsen E.V. Fish and chips: single chip silicon MEMS CTDL salinity, temperature, pressure and light sensor for use in fisheries research[J]. Micro Electro Mechanical Systems, 2005, 303: 306.

2. Jian-guo Li. The development and experiment of open-cell four-electrode conductivity probe [J]. Ocean Technology, 2005, 24(3), 5: 9.

3. Fu-yan Dai, Wei-ping Zhang, Wen-yuan Chen. Survey on MEMS micromotor[J]. Micro motor, 2009, 42(8), 61: 64.

4. Hong-wei Wang, Xun-shi Zhang. Analysis of a new-typed four-electrode conductivity probe [J]. Chinese journal of science instrument, 1998, 19(4), 399: 402.

5. Ge-hua Chen, Yu-jian Teng, Xiao-hui Wang. A new way to measure conductance [J]. Journal of northeast china institute of electric power engineering, 2005, 25(6), 76: 78.