System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer-Reference-Cited by-同舟云学术

System Design of Nonideal Fourth-Order Sigma-Delta Micromachined Accelerometer

Published:2011-06 Issue: Volume:483 Page:219-223
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Liu Xiao Wei¹,Li Zhi¹,Sun Guan Nan¹,Liu Yun Tao²

Affiliation:

1. Harbin Institute of Technology

2. Harbin Engineering University

Abstract

The paper describes the system design for a nonideal capacitive micromichined accelerometer in MATLAB/SIMULINK. In this paper, a fourth-order sigma-delta micromachined accelerometer system design is represented, which includes the electrode movement and circuit noise. By simulation and comparison with the ideal 4th-order sigma-delta accelerometer in MATLAB, we have found that the SNR is essentially influenced by the electrode movement. Moreover the influence of the electrode stiffness Ke is researched. We have also researched the effects of the kT/C noise and the front-end amplifier noise. This nonideal accelerometer system can represent more accurate simulation result.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.483.219.pdf

Reference7 articles.

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3. Dingbang Xiao, Xuezhong Wu: System Design of Second-Order Sigma-Delta Micromachined Accelerometer, IEEE International Conference on Nano/Micro Engineered and Molecular Systems(2006), 229–302.

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