Development of the 400MHz Power Durable SAW Filter-Reference-Cited by-同舟云学术

Development of the 400MHz Power Durable SAW Filter

Published:2011-06 Issue: Volume:483 Page:381-386
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Gao Yang¹,Chen Ying Duan²,Xi Shi Wei¹,Zheng Ying Bin¹,Zhang Chao¹

Affiliation:

1. China Academy of Engineering Physics

2. Southwest University of Science and Technology

Abstract

Rapid development of wireless communication system requires high frequency and high power surface acoustic wave (SAW) filter. For SAW RF MEMS devices on diamond film, they have higher working frequency and more power endurance. A SAW RF MEMS filters on diamond film is designed. Its center frequency is 400MHz, and the line width of its Inter Digital Transducer (IDT) is 5μm. The diamond film on silicon substrate is customized by the CAEP ultra-hard material Co. 2μm thick ZnO piezoelectric film is deposited on diamond film by RF sputtering method. XRD analysis shows that the ZnO film has good C-axis orientation. IDT is fabricated by lift-off process. With delicate process control, designed delicate IDT pattern is acquired. The SAW RF MEMS filter prototype is finally packaged and tested. Its measured center frequency is about 378MHz, with insertion loss of 15.99dB.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.483.381.pdf

Reference7 articles.

1. J.J. Chen, D.M. Li and F. Pan: J. Vacuμm Science and Technology Vol. 23-6 (2003), p.47.

2. Y.D. Pan, M.L. Qian, E.K. Liu, et al.: J. Synthetic Crystals Vol. 26-3, 4 (1997), p.32.

3. Y.D. Chen, Y. Gao, Z.C. Bai, et al.: Micronanoelectronic Technology Vol. 12-46 (2009), p.739.

4. H. Nakahata, A. Hachigo, K. Higaki, et al.: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Vol. 42-3 (1995), p.362.

5. L. Yang, T.L. Ren, L.T. Liu: Piezoelectrics and Acoustooptics Vol. 23-2 (2001), p.89.