Abstract
In order to improve the precision, speed, integration and reliability of the linear CCD system, A method of data acquisition for high resolution output signal of linear array CCD using FPGA is introduced. The CCD signal acquisition circuit with high speed and high sensitivity is designed based on the combination of FPGA with high-speed A/D conversion chipset to gather the signals of high-speed. The experimental results demonstrated that defects within 50μm~1000μm were inspected effectively by the CCD scanning defects inspection instrument, that this method has a repetition error no more than 2.24 pixels, with high precision and good anti-noise ability.
Publisher
Trans Tech Publications, Ltd.
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