Abstract
The R&D of state of the art PZT (PbZrxTi1-xO3) films is important due to their
piezoelectric, pyroelectric and ferroelectric properties. Currently, Chemical Solution Deposition
(CSD) methods (e.g. spin coating of a sol-gel precursor solution) are successfully used in our lab to
deposit PZT films with intermediate thickness. This method employs multiple coating procedures
and different microstructure is observed after each coating. We report on the film microstructure
evolution studied by quantitative analysis of HRSEM images as a function of thickness.
Publisher
Trans Tech Publications Ltd
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