Abstract
Tungsten oxide nanorods were prepared in a hot filament chemical vapor deposition
(HFCVD) reactor. A mixture of gases containing hydrogen, oxygen or hydrogen and methane
mixed with water vapor were passed into a quartz glass jar reactor and activated using a heated
tungsten filament. The resulting deposits were characterized by transmission electron
microscopy (TEM), x-ray diffraction (XRD), and Raman Spectroscopy. The deposit consisted of
tungsten oxide nanorods (5 – 10 nm diameter and 50 – 75 nm long) and tungsten nanospheres
with diameters of ~50nm. The tungsten oxide is then reduced to metallic tungsten by annealing
in a hydrogen environment.
Publisher
Trans Tech Publications Ltd
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