Orientation Maps Derived from TEM Diffraction Patterns Collected with an External CCD Camera

Abstract

An automatic crystallographic orientation indexing procedure is developed for transmission electron microscopes. The numerical identification is performed by mapping the spot diffraction patterns with pre-calculated templates. The diffraction patterns are acquired thanks to an external CCD camera that points to the fluorescent screen through the TEM window. Orientation maps with spatial resolution better than 10 nm were obtained with this low cost equipment.