SiC Epitaxy on Non-Standard Surfaces
Author:
Affiliation:
1. Kyoto University
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.scientific.net/MSF.433-436.125.pdf
Reference23 articles.
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3. T. Hirao, H. Yano, T. Kimoto, H. Matsunami and H. Shiomi: Mater. Sci. Forum Vol. 389-393 (2002), p.1065.
4. P.G. Neudeck and J.A. Powell: IEEE Electron Device Lett. Vol. 15 (1994), p.63.
5. J. Takahashi, N. Ohtani and M. Kanaya: J. Crystal Growth Vol. 167 (1996), p.596.
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