Affiliation:
1. Shizuoka University
2. National Research Institute of Advanced Industrial Science and Technology (AIST)
3. Meijo University
Abstract
To realize a fine focused electron beam less than several ten nm in diameter, the initial emission angle must be narrowed as much as possible. To control the initial emission angle, we have introduced a suppressor gate below the extractor gate electrode. The paper describes the fabrication of the field emitter array with a built-in suppressor gate.
Publisher
Trans Tech Publications, Ltd.
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