Microstructure of CrN-Based Nano Composite Solid Lubrication Films

Abstract

The complex plating-sulfurizing process which fitted magnetron sputtering together with low temperature ion sulfurizing, was utilized to prepare a new CrN-based nano composite solid lubrication films with different Mo content. The structure, surface morphology, composition, and valence states of CrMoN composite coatings are tested by XRD, EDS, SEM and XPS respectively. The SEM results showed that the roughness of CrN composite coating reduces with addition of Mo element. X-ray diffraction pattern indicated that the preferential growth orientation of the coatings is changed from CrN (111) to CrN (220) after the addition of Mo element, the diffraction peaks shift leftwards as Mo content increasing, and the majority of phases are Mo2N and CrN, besides which MoS2 and Cr2S3 were created.