Affiliation:
1. Korea Institute of Science and Technology
2. Korea University
Abstract
Zinc oxide and tin oxide (ZnSnOx) films on PET (Polyethylene Terephthalate)
substrate were prepared by the electron cyclotron resonance-metal organic chemical vapor
deposition (ECR-MOCVD) under an hydrogen, oxygen and argon atmosphere. The used tin and
zinc precursor are TMT (tetramethyltin) and DEZn(diethylzinc), respectively. The metal (Zinc and
Tin) oxidation content plays an important role to control the optical and electrical characteristics of
the films. Therefore the optimum DEZn/TMT content can be determined by the counter stability
effect between oxidation and zinc-tin deposition. The obtained ZnSnOx (or SnOx-ZnO) of high
mobility films exhibited c.a. 7.0×10-3 ohm ·cm of electrical resistivity.
Publisher
Trans Tech Publications, Ltd.
Cited by
1 articles.
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