Some Issues of Modeling the Double Barrier Metal-Oxide-Semiconductor Tunnel Structures

Author:

Majkusiak Bodgan1,Mazurak Andrzej1

Affiliation:

1. Warsaw University of Technology

Abstract

The paper discusses some issues of modeling the MOS tunnel structure with a gate stack containing a semiconductor quantum well (double barrier MOS system). The considerations are illustrated by simulations with the use of a theoretical model. Results of simulations are compared with experimental characteristics of fabricated DB MOS diodes.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Reference9 articles.

1. B. Majkusiak: in Nanoscaled Semiconductor-on-Insulator Structures and Devices, edited by S. Hall et al., Springer (2007).

2. A. Mazurak, J. Walczak and B. Majkusiak: 16th Workshop WoDiM 2010, Bratislava, Slovakia, Jun. 28-20, 2010, Book of Abstract, p.32, and submitted to J. Vac. Sci. & Techn. B (2010).

3. B. Majkusiak: J. Computational Electronics, Vol. 6 (2007), p.207.

4. P. Palestri et al.: IEEE Trans. Electron Dev., Vol. 54 (2007), p.106.

5. J. Grabowski, A. Mazurak, T. Płociński, M. Andrzejczak, K.J. Kurzydłowski, B. Majkusiak and R.B. Beck: 6th Workshop Diagnostics & Yield D&Y 2009, Warsaw, Poland, Jun. 22-24, (2009).

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