Isotropic Pyrolytic Carbon Fabricated by Developing Self-Heating Plates Chemical Vapor Deposition

Abstract

Isotropic pyrocarbon was deposited on self-heating plate at 1100°C and atmospheric pressure via a novel deposition reactor. Two graphite papers were mounted horizontally in chemical vapor deposition furnace, which were used as self- heating plates with alternating current flowing through them. And the upper surface of the lower self-heating plate also was used as substrate of pyrocarbon deposition. The microstructure of the deposit was investigated by polarized light microscopy, scanning electron microscope, transmission electron microscopy and laser Raman spectra, respectively. The results showed that there were some irregular clusters of globular structure and onion-like structure in the deposits. The thickness and density of deposit were13-15 mm and 1.88 g/cm3in 30h. A novel deposition model of electromagnetic effect on intermediate product has been developed in order to establish a better description of the deposition process.