Research on Infrared Antireflective Characteristics of Two-Dimensional Sub-Wavelength Structures

Abstract

In order to improve the transmission and durability of infrared optical materials, the antireflection characteristics of two dimensional sub-wavelength structures on infrared optical materials were investigated. The results of numerical modeling showed two dimensional sub-wavelength structures can improve the transmission of infrared optical materials over a broad band, especially pyramid structures. Then two dimensional sub-wavelength structures on Zinc sulfide were fabricated with contacting ultraviolet lithography and reactive ion etching, A substantial antireflection effect was obtained over the wavelength band 8~12 μm. To improve the environmental durability of the antireflective sub-wavelength structures, Germanium carbide film was deposited on the two dimensional sub-wavelength structures by reactive RF magnetron sputtering.