Affiliation:
1. National Taiwan University of Science and Technology
2. National Taiwan University
Abstract
A program based on the SOR method have been setup for calculating the electrostatic potential inside the electron optical system (EOS). This method can deal with large domain calculation more efficiently than by using the finite difference or finite element methods. Since the MEBDW system is composed of an array of EOSs, periodic boundary conditions in thexandydirections are applied. A case of EOS is demonstrated in this paper.
Publisher
Trans Tech Publications, Ltd.
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