Design Net-Grid Subwavelength Gratings for High Quantum Efficiency Photodetectors

Abstract

Subwavelength gratings (SWGs) that consist of net-grid structure are designed as infrared reflectors in this paper. By rigorous coupled wave approach (RCWA) and finite difference time domain (FDTD) method, we simulate its reflectivity which can reach 99.98% at 1.55μm while maintaining reflectivity higher than 99% across the 1.47-1.59μm wavelength range. We introduce SWG reflectors as the bottom mirrors in resonant cavity enhanced photodetectors (RCE PDs). RCE PD's quantum efficiency is increased to 95.7% at 1.55μm and the device has a significant size reduction compared with only using DBR bottom mirror.