Study on Micro-Displacement Stage Driven by Piezoelectric Actuator

Abstract

In order to improve the accuracy of position for the machine, a micro-displacement stage is deigned based on piezoelectric actuator and flexible hinge. The structure of the flexible hinge is analyzed reasonably. With the hybrid method of feedforward and digital PID control, the control process of the micro-displacement stage can be corrected and compensated. It is indicated by experiment that the maximum stroke of the micro-displacement stage is , and the position accuracy is , which can meet the requirement of precision and ultra-precision machining.