Affiliation:
1. Korea Institute of Machinery and Materials
2. Korea Institute of Machinery and Materials (KIMM)
Abstract
Prediction of porosity level for the Si3N4 filter substrate manufactured by reaction
bonding of Si compact and subsequent post-sintering was attempted and its validity was verified by
comparison between calculation and measurement. Both are well matched in the specimens of asnitrided
and low temperature post-sintering, while few percents higher measurement in high
temperature post-sintered specimens resulted from weight loss during the process.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
8 articles.
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