Surface Composition Transformation of Thin Film Based on Al Grown by CBE on the (001) GaAs Surface Due to Laser Assistance-Reference-Cited by-同舟云学术

Surface Composition Transformation of Thin Film Based on Al Grown by CBE on the (001) GaAs Surface Due to Laser Assistance

Published:2011-05 Issue: Volume:316-317 Page:89-95
ISSN:1662-9507
Container-title:Defect and Diffusion Forum
language:
Short-container-title:DDF

Author:

Lioubtchenko Dmitri V.¹,Briantseva Tatiana A.²,Lebedeva Z.M.²,Bullough Tim J.³

Affiliation:

1. Aalto University School of Science and Technology

2. Institute of Radio Engineering and Electronics RAS

3. University of Liverpool

Abstract

It is shown that laser-assisted growth of Al films using the CBE method results in remarkable surface composition transformations. The values of the laser reflectivity are slightly correlated with the composition or with the metal thickness. The energy characteristics of the reactions guide the reflectivity changes, together with thickness changes. It was shown that the composition within the laser spot is different from that outside the laser spot due to the destruction of compounds under laser exposure.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Radiation

Link

https://www.scientific.net/DDF.316-317.89.pdf

Reference7 articles.

1. J.M. Poate, J.W. Mayer, Laser Annealing of Semiconductors (Academic Press, New York, 1982).

2. T.A. Briantseva, Z.N. Lebedeva, I.A. Markov, T.J. Bullough and D.V. Lioubtchenko. Process-Induced Modification to the Surface of Crystalline GaAs Measured by Photometry. Applied Surface Science, 143 (1999) 223.

3. T.B. Joyce, Journal of Crystal Growth, 105 (1990) 299.

4. J. Rumberg, F. Reinhardt, W. Richter, T. Ferrell and J. Armstrong, Journal of Vacuum Science and Technology B, 13 (1995) 88.

5. J. Armstrong, T. Ferrell, T.B. Joyce, P. Knightley, T.J. Bullough and P.J. Goodhew, Journal of Crystal Growth, 120 (1992) 84.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of the Transformation of Gallium Arsenide Surface Layers under the Action of Light by Means of Surface Acoustic Waves;Journal of Communications Technology and Electronics;2021-05

2. Mass transfer in GaAs surface layers under the action of low-intensity electromagnetic waves;Semiconductors;2014-02