Affiliation:
1. Tongji University
2. Tianjin Huanou Semiconductor Material and Technology Co., Ltd.
Abstract
Currently, the competitiveness of enterprises is turning to a full range of competitive products, quality, cost, and services. At the same time production is gradually shifted to automation, systematic mode. In this context, the fast, accurate transfer of information within the enterprise becomes particularly important. In order to manufacture products according to customer requirements, and efficient to meet the market demand, it’s vital to collect and deliver information timely and accurately during the whole process of production. This paper presents a data acquisition and interlock system for wafer production line to achieve the comprehensive management and control of the production process of the wafer. The system uses the Internet of Things (IOT) technology, wireless self-help network connection to connect network while booting. This achieves parameter settings, data acquisition, smart management and real-time monitoring of the flow sequence control in wafer production. In addition, the Internet of Things wireless communication technology to provide greater flexibility, fluidity, eliminating the cost and effort spent on wiring, realized in the true sense of the real-time, intelligent, low-power effect.
Publisher
Trans Tech Publications, Ltd.
Cited by
2 articles.
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