Design and Analysis of Micro Accelerometer for Tool Condition Monitoring

Abstract

Tool condition monitoring plays a huge role in the CNC machines in which it is used to avoid the breakage of the tools.In this paper area changed capacitive micro accelerometer is designed to measure the vibration exposure of the tool on various applications in the CNC machines. The design process and simulation of the Micro accelerometer are done using INTELLISUITE 8.6. The rectangular folded beamis designed to reduce the residual stress and to obtain a better sensitivity. Static and dynamic analysis shows that sensitivity of the designed capacitive accelerometer is good enough to detect the vibration of the tool.