Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method
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Published:2021-02
Issue:
Volume:314
Page:143-149
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ISSN:1662-9779
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Container-title:Solid State Phenomena
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language:
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Short-container-title:SSP
Author:
Salhab Abbas Ramez1, Carlier Julien1, Campistron Pierre1, Neyens Marc2, Toubal Malika1, Nongaillard Bertrand1, Thomy Vincent3
Affiliation:
1. Univ. Polytechnique Hauts-de-France, CNRS, Univ. Lille, ISEN, Centrale Lille, UMR 8520, Institut d’Électronique de Microélectronique et de Nanotechnologie 2. STMicroelectronics 3. Institute of Electronics, Microelectronics and Nanotechnology
Abstract
Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of DTI structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PDMS micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Reference10 articles.
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