Intensities of Hβ and Hγ in Hydrogen Plasma Spectrum with High RF Power Levels at ICP

Abstract

In high-power RF ion source, three different regions of the Hβand Hγintensities in the Balmer series of spectral lines for atomic hydrogen plasma were investigated. Three different regions of the Hβand Hγintensities were detected by the increase of input power (0-6 kW) at ICP. In hydrogen plasma spectrum, the Hβand Hγintensities showed three processes: slowly increase, quickly increase and stable saturation. The Stark effect in strong electrical field plays a crucial role in dominating the Balmer Hβand Hγemissions from high-density RF plasma.