Affiliation:
1. Shanghai Jiao Tong University
Abstract
A period-variable grating is designed and fabricated in this paper. The PDMS grating is replicated by method of Si mold which is fabricated by MEMS process. The grating is connected with a mechanical system which can change its pitch when a force is applied, so it can extend the grating and change the grating's period. In the diffraction experiment, about 20% extension ratio of the first diffraction order has been obtained, which will generate the change of diffraction angle of 0.096rad.
Publisher
Trans Tech Publications, Ltd.
Reference5 articles.
1. Y. Li, S. Jia, H. Wang, D. Chen, K. Hane, Optics & Laser Technology, Vol. 34 (2002), p.649.
2. J.A. Cox, SPIE, Vol. 3008(1997), p.289.
3. W. Chuang, C. Ho, W. Wang, Optical Express, Vol. 13(2005), p.6685.
4. M. Sasaki,Y. Arai,K. Hane, Opt. Rev., Vol. 5, No1.
5. C. Luo, Y. Li, S. Susumu, Optics & Laser Technology Vol. 44 (2012), p.1649.