Analytic Model and FEM Characterization of Two Piezoresistive Microphone Membrane

Abstract

In this paper we will present the analytical modeling of two different microphone membranes (one square and one circular) fabricated using the MultiMEMS process at Sensonor in Norway. In particular we built up a mathematical model of the pressurebehavior inside the cavity, when an external pressure is applied. The time constant of the exponential solution, gave us the possibility to estimate the minimum working frequencies of these devices. We compared the results that we found with both the mechanical resonance estimates from FEM models and the initial measurements of the devices presented in [.