Novel MEMS Switch Topology and Nanosensor Package for Multi-Analyte Chemical Detection

Abstract

In this work, we present the development of MEMS switch array and ZnO nanowire-based sensor technology to detect multiple analytes in a sensitive manner. A novel approach that incorporates the advantages of MEMS technology with highly sensitive ZnO nanowire sensor technology has been described. We demonstrate the fabrication of MEMS switch arrays and ZnO nanowire sensing chip that has been appropriately developed. Our integrated approach is believed to enhance the sensitivity of the entire sensor system in addition to increasing the capability of the system to detect multiple analytes with high degree of selectivity.