Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor
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Published:2009-06
Issue:
Volume:74
Page:311-314
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ISSN:1662-8985
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Container-title:Advanced Materials Research
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language:
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Short-container-title:AMR
Author:
Ichiki Masaaki1,
Maeda Ryutaro2,
Suga Tadatomo1
Affiliation:
1. University of Tokyo
2. National Institute of Advanced Industrial Science and Technology (AIST)
Abstract
High dielectric capacitors , that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.
Publisher
Trans Tech Publications, Ltd.
Subject
General Engineering