Affiliation:
1. Chinese Academy of Sciences
2. Lanzhou University of Technology
Abstract
Graphite-amorphous carbon films were grown by sputtered Ni target in Ar/CH4 mixture atmosphere. The impacts of N2 import into reaction system on the structures and properties of the graphite-amorphous carbon films were studied. The results shown that graphite-amorphous carbon films with good hardness, elastic and friction coefficient were obtained at the N2/CH4 flow ratio below 20/80. Beyond the flow ratio of 20/80, the number and size of nanocrystal graphite decrease induce the bad hardness, elastic and friction coefficient of the graphite-amorphous films. Graphite-amorphous carbon films properties were possible correlate with the size and number of nanocrytal graphite and its crosslinking degree to carbon network, especially the former.
Publisher
Trans Tech Publications, Ltd.
Reference15 articles.
1. H. Hu, G. Chen, J. Zhang, Facile, Surf. Coat. Technol. Vol. 202 (2008) pp.5943-5946.
2. H. Hu, G. Chen, J. Zhang, Carbon Vol. 46 (2008) pp.1095-1097.
3. J. Zhang, Y. Yu, D. Huang, Solid State Sci. Vol. 12 (2010) pp.1183-1187.
4. Q. Wang, C. Wang, Z. Wang, J. Zhang, D. He, Appl. Phys. Lett. Vol. 91 (2007) p.141902.
5. C. Wang, S. Yang, Q. Wang, Z. Wang, J. Zhang, Vol. 19 (2008) p.225709.