Abstract
Two groups of indicator grating and scale grating produce two groups of first order Moiré fringe. Two groups of first order Moiré fringe interfere and produce second order Moiré fringe, and then by signal measurement and subdivide to the second order Moiré fringe, we can achieve nanometer accuracy. In which, the quality of the second order Moiré fringe has important influence on the quality of the nano-grating quality. In the second order Moiré fringe formation process, the characteristic of light source, the manufacture and assembling accuracy of scale grating and indicator grating and optical system, interference and noise etc. have an important influence on the quality of the second order Moiré fringe. This paper study the change of light source properties which formed the second order Moiré fringe to the quality of the second order Moiré fringe based on Lighttools software simulation. In order to provide a theoretical evidence for optimize design of the light source.
Publisher
Trans Tech Publications, Ltd.
Reference8 articles.
1. Richardson Grating Laboratory. Diffraction Grating Handbook. 6th edition. (2008).
2. C. Palmer, W. Mckinney and B. Wheeler. Imaging Equations for Spectroscopic Systems Using Lie transformations. Proc. SPIE[C]. 1998, 3450: 55-56.
3. E.K. Popov, E.G. loewen and M. Nevicre. Transmission Grating for Beam Sampling and Beam Splitting. Applied Optics[J]. 1996, 35: 3072-3075.
4. Yu Wenxin, Hu Xiaotang etc. The System Error Correct Technology Research Of Grating Nanometer Measurement[J]. ACTA METROLOGICAL SINICA, 2002(2): 100-105.
5. Ma Xiushui, Fei Yetai, Chen Xiaohuai, Zhao Jing. Theory Study of a New Nanometrology Grating. Chinese Journal of Scientific Instrument, 2006(2), 159-164.