Affiliation:
1. Hunan University
2. Zhejiang University of Technology
3. Harbin Institute of Technology
4. Zhejiang University
Abstract
The ultra-precision lapping processes to obtain the damage-free surfaces at Å level surface
roughness of Potassium titanyl phosphate (KTiOPO4, KTP) crystal is studied in this paper. The
influence of the lapping parameters on the stoke removal rate and surface roughness and material
removal mechanism in the process of ultra-precision lapping process is discussed, and the evolution
of the lapped surface is also observed with electric telescope. A super-smooth surface of quartz crystal
with roughness Ra 0.8667 Å has been obtained by adopting the fine SiO2 abrasive powders and the
elastic polyurethane pad in this study.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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