Affiliation:
1. Hong Kong Polytechnic University
2. The Hong Kong Polytechnic University
Abstract
Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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