Preparation of Lead-Free Multi-Layered Piezoelectric Actuator

Abstract

[BaO]m(Ti0.975Zr0.025)O2 ceramics with Ni electrodes were prepared by a firing in N2 atmosphere. The dielectric, ferroelectric and piezoelectric properties were examined in terms of the composition. The remanent polarization of 9.5μC/cm2 was obtained for m=1.01 by the addition of 0.5wt% SiO2. The longitudinal piezoelectric constant d33 calculated from a unipolar signal (8kV/cm,10Hz) was 430pC/N. Lead-free multi-layered piezoelectric actuators were fabricated using this material by the tape casting, screen-printing of Ni electrodes, laminating under heat and pressure, and firing in N2 atmosphere. The displacement of the actuator with 75μm x 9 active piezoelectric layers was 0.17μm at an applied voltage of 75V and a frequency of 10Hz.