Micromachining Characteristics of Sapphire with Fifth HG Nd:YAG Laser-Reference-Cited by-同舟云学术

Micromachining Characteristics of Sapphire with Fifth HG Nd:YAG Laser

Published:2007-01 Issue: Volume:329 Page:589-594
ISSN:1662-9795
Container-title:Key Engineering Materials
language:
Short-container-title:KEM

Author:

Noji Toshiyuki¹,Nakamura Kazuo¹,Horisawa Hideyuki¹,Yasunaga Nobuo¹

Affiliation:

1. Tokai University

Abstract

In order to reduce the thermal influences in laser machining of sapphire surface, effects of a short-pulse ultra-violet laser were investigated. For the UV laser, the Fifth harmonic generation (Fifth HG) wave of an Nd:YAG laser (wavelength:213nm) was utilized. Significant reduction of thermal damages on the surface was demonstrated with the Fifth HG pulses compared to longer wavelengths of the Nd:YAG laser. It was shown that the control of depth of bottom surface with reduced thermal influences was possible in lower fluence cases(less than 40 J/cm2) with a homogenized beam and smooth surface roughness Ra < 200nm was obtainable.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://www.scientific.net/KEM.329.589.pdf

Reference5 articles.

1. Soeda M, Kataoka T, Gosho Y, Kihara T, Ishikura Y, Kimura S, Masuda T, Nagata M: Tech. Dig. Sns. Symp. pp.191-194, (2000).

2. Yasunaga, N., Tarumi, N., Shinohara, K., and Mineta, S., Fundamental Study of Laser Machining (3rd Report), Proceeding of the 1980 Spring Symposium on Precision Engineering, 1980, pp.376-378 (in Japanese).

3. Tamura, S., Horisawa, H., Yamaguchi, S., and Yasunaga, N., Laser Ablation of Sapphire with a Pulsed Ultra-Violet Laser Beam, Initiatives of Precision Engineering at the Beginning of a Millenium (Proc. 10th International Conference of Precision Engineering (ICPE), Kluwer Academic Publishers, 2001, pp.224-228.

4. Horisawa, H, Emura, H and Yasunaga, N: Proc. 4th Int. Symp. Appl. Plasma Sci. 2003, pp.349-354.

5. Stoian, R., Ashkenasi, D., Rosenfeld, A., and Campbell, E. E., Laser Ablation of Sapphire with Ultrashort Pulses, Proceedings of SPIE Vol. 3885, pp.121-131, (2000).