Modeling of Piezoelectric Actuator Based Nano-Positioning System Using Multi-Polynomial Regression with C1 Continuity

Abstract

For nano-positioning systems with piezoelectric actuators used for dynamic grinding control, sinusoidal command signals will used and will give additional problems compared with the commonly used step signals because of the hysteresis effects, which require a good modeling approach. The proposed approach of multiple polynomial regression with first order continuity gives a relative modeling error of 2.65%. The method reduces the error by 26.3-80.2% in comparison with the methods using the single, dual, and multiple polynomial regression with zero order continuity.