Affiliation:
1. Tianjin University
2. Tianjin University of Technology and Education
Abstract
In order to implement dynamic compensation for the wheel vibration of surface grinding
machine, a micropositioning table with high stiffness and response frequency is designed. The
micropositioning table is driven by three piezoelectric actuators with stiffness of 400 N/μm. Three
capacitive sensors are utilized to form feedback control and flexure hinges are used to guide the
moving part and preload for the piezoelectric actuators. The kinetics of the micropositioning table
has been analyzed to understand the relationship of the control voltage and the posture of the
moving part. Due to the coupling characteristic of the system, the decoupling control method is
introduced to improve the performance of the table. Experimental tests are carried out to investigate
the performance of the micropositioning table.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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