Affiliation:
1. University of Bremen, Faculty of Production Engineering
2. Hochschule Bremen
Abstract
This paper presents an efficient computation method to evaluate scattered light intensity distributions, generated by a nanostructured surface which is illuminated with a monochromatic laser beam of several millimeters in diameter. The new simulation approach based on a modified Huygens-Fresnel approximation enables to improve measuring methods without expensive and time consuming experiments. The qualitative verification of the model results in a roughness measuring principle based on double scattering of coherent light.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference9 articles.
1. T.V. Vorburger, E.C. Teague: Precision Engineering , Vol. 3 (1981), pp.61-83.
2. P. Lehmann, S. Patzelt, A. Schöne: Applied Optics, Vol. 36 (1997), No. 10, pp.2188-2197.
3. P. Lehmann, G. Goch: Annals of the CIRP, Vol. 49/1 (2000), pp.419-422.
4. J.C. Dainty: Laser speckle and related phenoma (Springer Verlag, New York 1975).
5. P. Beckmann, A. Spizzichino: The scattering of electromagnetic waves from rough surfaces (Pergamon, London 1963).