Affiliation:
1. National Institute for Materials Science
2. National Institute for Materials Science (NIMS)
3. National Institute for Research in Inorganic Materials
Abstract
The defect structure of undoped ZnO and (Zn1-x,Mgx)O solid-solution films were deposited on
YSZ substrate with pulsed laser deposition (PLD) to investigate defect equilibria in those films. In
particular, the effects of thermal treatment on the structures and prosperities of (Zn1-x,Mgx)O
solid-solution films were examined. The films with high MgO concentration (x>0.12) decomposed
to the wurtzite-type and rock-salt-type phase after thermal treatment, indicating that the solubility
limit of Mg was about x=0.12 and the wurtzite-type (Zn,Mg)O films with x>0.12 were indicated to
be non-equilibrium ones. The subsequent analyses of oxygen diffusivity in those films revealed that
the films under non-equilibrium state, i.e., wurtzite-type (Zn1-x,Mgx)O with x>0.12, contained
significantly high concentration of anion defects.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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