Defect Structure in (Zn,Mg)O Films Prepared on YSZ Substrate

Author:

Ryoken Haruki1,Sakaguchi Isao1,Ohashi Naoki2ORCID,Adachi Yutaka1,Ohgaki Takeshi1,Hishita Shunichi3,Haneda Hajime1

Affiliation:

1. National Institute for Materials Science

2. National Institute for Materials Science (NIMS)

3. National Institute for Research in Inorganic Materials

Abstract

The defect structure of undoped ZnO and (Zn1-x,Mgx)O solid-solution films were deposited on YSZ substrate with pulsed laser deposition (PLD) to investigate defect equilibria in those films. In particular, the effects of thermal treatment on the structures and prosperities of (Zn1-x,Mgx)O solid-solution films were examined. The films with high MgO concentration (x>0.12) decomposed to the wurtzite-type and rock-salt-type phase after thermal treatment, indicating that the solubility limit of Mg was about x=0.12 and the wurtzite-type (Zn,Mg)O films with x>0.12 were indicated to be non-equilibrium ones. The subsequent analyses of oxygen diffusivity in those films revealed that the films under non-equilibrium state, i.e., wurtzite-type (Zn1-x,Mgx)O with x>0.12, contained significantly high concentration of anion defects.

Publisher

Trans Tech Publications, Ltd.

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference10 articles.

1. A. Tsukasaki, A. Ohtomo et al., Nature Materials 4 (2005) 42-46.

2. H. R. Segnit and A. E. Holland, J. Am. Ceram. Cos. 48 (1965) 412.

3. T. Takagi, H. Tanaka et al., Jpn. J. Appl. Phys. 42 (2003) L401-L403.

4. H. Ryoken, N. Ohashi, et al., accepted for publication in J. Cryst. Growth.

5. P. S. Manning, J. D. Sirman et al., Solid State Ionics 100 (1997) 1-10.

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