Affiliation:
1. Taiyo Yuden Co Ltd.
2. National Institute for Materials Science
3. National Institute for Materials Science (NIMS)
Abstract
The relationship between the distribution of hydrogen and the electrical properties of (Ba, Sr)TiO3
(BST) thin film capacitors was investigated using secondary ion mass spectroscopy (SIMS)
analyses. It has been clearly shown that there is a close relationship between the hydrogen
distribution in BST thin film and the frequency dependence of the complex impedance of the BST
thin film capacitors. It was confirmed that protons, the interstitial hydrogen impurity dissolved in
BST thin films annealed at 400oC, were produced by a thermal equilibrium reaction between the
hydrogen in the annealing atmosphere and the BST thin films.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Cited by
1 articles.
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