Use of Surfactants for Improved Particle Performance of dHF-Based Cleaning Recipes
Author:
Affiliation:
1. IMEC Interuniversity Microelectronics Center
2. Assignee at IMEC of SEZ AG
3. IMEC
4. IMEC VZW
5. Naval Research Laboratory
6. Ashland Chemical
Publisher
Trans Tech Publications, Ltd.
Subject
Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics
Link
https://www.scientific.net/SSP.76-77.263.pdf
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
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2. Control of adhesion and desorption behavior of silica particles on InGaAs surfaces by addition of hexadecyltrimethylammonium bromide in ammonium hydroxide–hydrogen peroxide mixture solution;Applied Surface Science;2022-07
3. Surface Defect Classification in Silicon Wafer Manufacturing Using the Linear-Based Channeling and Rule-Based Binning Algorithms;Advanced Materials Research;2022-04-19
4. The Use of Surfactants in Enhanced Particle Removal During Cleaning;Surfactants in Precision Cleaning;2022
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