On the Temperature-Related Mechanical Properties of UV-LIGA Nickel Material

Abstract

MEMS nickel material is commonly used for structural material in micro devices. In order to study the effect of environmental temperature on its mechanical properties,this paper has built up a experimental system which can measure the temperature-related static mechanical parameters of the UV-LIGA nickel material. By using the system for uniaxial tensile experiments of the micro specimen under different temperature, the stress-strain curves of the micro specimen under different temperature were obtained; the mechanical parameters of the micro specimen such as elastic modulus, yield stress and failure stress under different temperature were also calculated out;Finally, the relationship between temperature and mechanical parameters including elastic modulus, yield stress and failure stress was analyzed.