Design‚ Optimization and Simulation of an Electric Field Microsensor Based on PZT Piezoelectric Interdigitated Cantilevers

Abstract

In this paper, we demonstrate the design ‚ optimization and simulation of an electric field microsensor based on PZT piezoelectric interdigitated cantilevers driven. The working principle is introduced, and the induced charge ability of the sensitive cantilever structure is simulated and analyzed using finite element analysis (FEA) method. A multilayer compound cantilever structure (Al/Si3N4/Pt/PZT/Pt/Ti/SiO2/Si) have been designed as the sensing element and PbZrxTi(1-x)O3 (PZT) thin film is used as the piezoelectric material to drive the cantilevers vibrating. This microsensor is fabricated based on the simulation results. The electric field microsensor is tested under the direct current electric field with the field intensity from 0 to 45000 v/m, and the output voltage signal of the microsensor showed a good linear response to the intensity of applied electric field.