Influence of Hydrogen Gas Dilution on the Properties of Silicon-Doped Thin Films Prepared by the Hot-Wire Plasma-Assisted Technique
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Published:2002-10
Issue:
Volume:230-232
Page:591-594
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ISSN:1662-9795
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Container-title:Key Engineering Materials
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language:
-
Short-container-title:KEM
Author:
Ferreira Isabel1,
Vilarinho Paula M.2,
Braz Fernandes Francisco Manuel1,
Fortunato Elvira3,
Martins Rodrigo1
Affiliation:
1. Universidade Nova de Lisboa
2. University of Aveiro
3. New University of Lisbon
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science