Affiliation:
1. Chinese Acadamy of Sciences
Abstract
A silicon interlayer was introduced between the DLC films and 202 stainless steel
substrate using a medium frequency magnetron sputtering. The adhesion was evaluated by the
scratch tests and wear tests together. Two main parameters in the deposition process of Si
interlayers, i.e. the sputtering current and pulse bias voltage, were optimized respectively, and the
action mechanisms were discussed as well. Moreover, a special treatment with the purpose of
forming a complete graded intermixed Si-Fe interface was designed to improve the adhesion
strength further. DLC films with good adhesion strength were deposited on 202 stainless steel
substrates using a silicon interlayer.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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