Influence of Temperatures on the Formation of SiBCN Powders Prepared by CVD Using Borazine and Liquid Polycarbosilane

Abstract

SiBCN powders have been prepared by chemical vapor deposition using borazine and liquid polycarbosilane as source precursors in the deposition temperature range from 800 °C to 1100 °C, with the pressure of 10 kPa. The effect of the temperatures on the surface morphologies of the as-received powders was investigated by SEM. FTIR analysis of the powders was used to obtain the composition of the powders, and the XRD analysis was used to determine the crystalline state of the deposits. The results showed the powders were amorphous and composed of normally spherical grains.