Properties of SnO2-TiO2 Composite Films Deposited Using Jet Nebulizer Spray Pyrolysis for Gas Sensors

Abstract

Crystalline SnO2– TiO2thin films were deposited on glass substrates by using the precursor solution containing tin acetate and calcium titanate as the source materials. After the deposition, the films were subjected to annealing at two different temperatures of 150o C and 3000C. The structural, morphological and electrical properties have been investigated. X-ray diffraction analysis showed that the as-deposited as well as the annealed films were well crystallized and polycrystalline with cubic structure having (110) preferred orientation. AFM analysis showed uniform surface morphology with very low surface roughness values. The electrical parameters like the resistivity values are found decreasing and the mobility and carrier concentration values are observed to increase with annealing temperature. Sensor studies on SnO2– TiO2films annealed at 300oC showed very good response to methanol gas.