Affiliation:
1. Central Research Institute of Electric Power Industry (CRIEPI)
Abstract
This paper demonstrates three-dimensional imaging of threading screw dislocations (TSDs) and threading edge dislocations (TEDs) in 4H-SiC using two-photon-excited photoluminescence (2PPL) band-edge emission. Three-dimensional (3D) images of TSDs and TEDs are successfully obtained as dark contrasts on a bright background of band-edge emission. The intensity inversion of a 2PPL 3D image yields a perspective to visually examine the propagation behavior of dislocations. The tilt angles of TEDs are also measured and shown to correlate with the directions of the extra half planes of TEDs.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
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