Vacuum Arc Deposition of Carbon and Carbon-Based Coatings

Abstract

The paper describes the main features of the vacuum arc deposition of carbon and carbon-based coatings. This type of films and coatings is very interesting for the various areas of science and technology due to its unique properties. Pulverization of carbon in the vacuum arc discharge allows achieving the formation of carbon films and coatings of various structural modifications. The character of the particles deposition from the plasma flow depends on their energy and defines adhesion of the formed coating to the substrate, and also its structure, composition and existence of the formed defects.