Some Properties of Thin Film Structures on the Base of ZnO Obtained by MOCVD Method-Reference-Cited by-同舟云学术

Some Properties of Thin Film Structures on the Base of ZnO Obtained by MOCVD Method

Published:2013-04 Issue: Volume:200 Page:3-9
ISSN:1662-9779
Container-title:Solid State Phenomena
language:
Short-container-title:SSP

Author:

Roshchina Nina M.¹,Smertenko Petro S.¹,Stepanov Volodymyr G.¹,Zavyalova Lyudmyla V.¹,Lytvyn Oksana¹

Affiliation:

1. National Academy of Sciences of Ukraine

Abstract

The ZnO thin film structures were obtained by MOCVD method under atmospheric pressure onto Si substrates heated up to 250-350 оС. The film thickness varied from 0.4 – 0.5 µm. The phase composition, structure and morphology of ZnO films as well as electrophysical properties of ZnO/Si heterojunction on their base were investigated. The possible charge flow mechanisms in ZnO/Si heterojunction are discussed.

Publisher

Trans Tech Publications, Ltd.

Subject

Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics

Link

https://www.scientific.net/SSP.200.3.pdf

Reference25 articles.

1. A.S. Riad, S.A. Mahmoud and A.A. Ibrahim, Structural and DC electrical investigations of ZnO thin films prepared by spray pyrolysis technique, Physica B: Condensed Matter 296 (2001) 319-325.

2. D.P. Norton, Y.W. Heo, M.P. Ivill et. al., ZnO: growth, doping & processing, Material Today 6 (2004) 34-40.

3. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner, Recent progress in processing and properties of ZnO, Progress in Material Science 50 (2005) 293-340.

4. V.S. Khomchenko, L.V. Zavyalova, N.N. Roshchina et al., Fabrication and properties of ZnO: Cu and ZnO: Ag thin films, Superlattices and Microstructures 42 (2007) 94-98.

5. T.G. Kryshtab, L.V. Zavyalova, N.N. Roshchina. et al., Preparation and properties of thin ZnS: Cu films phosphors, Thin Solid Films 515 (2006) 513-516.

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Metal oxides for electronics and the SPQEO journal;Semiconductor Physics, Quantum Electronics and Optoelectronics;2024-06-21

2. Synthesis of zinc oxide nanoparticles by pulse laser deposition technique for gas sensing applications;Journal of Optics;2023-06-19

3. Formation of Cu2O and ZnO Crystal Layers by Magnetron Assisted Sputtering and Their Optical Characterization;Semiconductors;2018-03

4. Structural, Optical and Electrical Properties of Zinc Oxide Layers Produced by Pulsed Laser Deposition Method;Nanoscale Research Letters;2017-04-04

5. Structural and Electro-Physical Properties of ZnO Films, Obtained by a MOCVD Method on Glass and Silicon Substrates;Solid State Phenomena;2015-06